E-3500 ion milling system Overview

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Mechanical polishing is now the useful method of producing sectional specimen when using scanning electron microscope to perform cross-section observation, X-ray analysis, and analysis of particle crystal orientation. However, skilled technique is essential when using mechanical polishing on flat mirror surfaces, and it has proved especially difficult to polish composite materials of varying hardness on mirror surface.

E-3500 uses argon ion beam to give clear finish to the section of specimen on mirror: The beam displays great force for the final finish or sectional specimen of various materials.

Key Features

1. Flat milling surface
   E-3500 shields part of the argon ion beam with the mask arranged on the specimen, and make its flat cross section along the edge of the mask.
2. Eliminating flaws or distortions
   E-3500 eliminates flaws or distortions by argon ion beam, which cannot be removed through mechanical grinding or cutting, and reduces ion beam streaks by swinging the specimen stage during milling.
3. Flexible condition setting according to the specimen
   The discharge voltage can be selected from 0 to 4kv and the accelerating voltage can be selected from 0 to 6kv. Therefore, various specimens such as from firm sample like mineral to high polymer sample which can easily be damaged are adoptable for normal operation.
4. Easy sample attachment
   The specimen holder can be removed from the specimen stage unit. This mean that specimen fastened onto the specimen stub can easily be loaded onto the specimen holder.
5. Removable specimen stage
   The specimen stage unit is designed to be removable from the E-3500 main unit considering well operation. The milling position and mask can easily be adjusted under the separately attached optical microscope. (standard-equipped).
6. TMP in standard
   Utilizing TMP in standard, it is succeeded to save the electricity consumption by about 56%* (average) and the room space by about 25%* comparing with E-3200 (with oil diffusion pump) . *: comparison including the cool water circulator.
7. Stable Ion beam current
   The ion beam current is adjusted by flow control of argon gas introduced in the ion gun. E-3500 adopts mass flow controller for this adjustment and stable discharge current can be obtained.
8. Easy operation
   A series of processes from evacuation in the specimen chamber to milling are achieved by simple operation. In addition, in case of power failure or accident, the protective circuit is actuated and protects the unit from trouble.