Hitachi FlexSEM-1000
Compact SEM

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The FlexSEM 1000 VP-SEM combines innovative technological features with an intuitive interface, to deliver adaptability and flexibility in a powerful, automated, lab-friendly package. Cutting-edge technology and circuitry provides unrivaled imaging performance, even in variable-pressure environments, a feature previously only available in a full-sized SEM. This SEM runs on clean energy for an economical analytical tool, without compromising performance.

The FlexSEM Microscope features newly designed electron optical and signal detection systems providing unparalleled imaging and analytical performance in a lab-friendly configuration. Keeping efficiency in mind, the FlexSEM features an adaptable, separable, and compact design, such that it can be installed in limited office, laboratory, or even mobile spaces. Engineered to appeal to both the novice and expert microscopist for a wide range of applications, including biological and advanced material specimens, this microscope will certainly expand your analyses as well as your expectations.

The FlexSEM will change your view of electron microscopy!

Compact & High-Performance Column

Best-in-class resolution in a compact system. The FlexSEM employs a newly designed electrical optical system with a reliability-proven high-sensitivity detector, achieving imaging at 4 nm.

High-Resolution Image

The electron optics incorporate a low aberration objective lens and a unique gun bias system that allows delivery of high emission current.

  • Accelerating Voltage: 20kV
  • Secondary Electron (SE) Image
  • Magnification: 60,000x
  • Resolution: 4.0 nm
  • Accelerating Voltage: 20kV
  • Backscattered Electron (BSE) Image
  • Magnification: 50,000x
  • Resolution: 5.0 nm

Ultra-Variable Pressure Detector

Novel low vacuum technologies enable observation of the surface of non-conductive specimens without preprocessing, across the entire pressure and accelerating voltage ranges.

New & Improved Auto Functions

The user interface is easy to operate even by novice users, and with the various automated functions, high-quality and quick data acquisition can be accomplished regardless of user experience level. A touch panel operation is possible.

Intuitive & Correlative Navigation

SEM MAP helps to locate regions of interest quickly, and delivers accurate correlated optical and SEM images using only one click. Optical and EM correlation function, SEM MAP is fully integrated into the graphical user interface.