Hitachi AFM5500M
Scanning Probe Microscope

The AFM5500M is a SPM platform equipped with a fully addressable 4-inch stage, optimized for medium-sized samples. It affords exceptional levels of ease of use, automation, and accuracy, as well as correlation for AFM/SEM investigations.


Stage Automated, fully addressable 100 mm (4 inch) stage
Travel range: XY ±50 mm (2 inch), Z ≥21 mm
Minimum step size: XY 2 µm, Z 0.04 µm
Sample size Diameter:100 mm (4 inch)
Thickness: 20 mm
Weight: 2 kg
Scan range 200 µm x 200 µm x 15 µm (XY: Closed loop control, Z: Displacement sensor)
RMS Noise Level ≤0.04 nm (High-resolution mode)
Repeatability XY: ≤15 nm(3σ, measuring 10 µm pitch)/Z: ≤1 nm (3σ, measuring 100 nm depth)
XY Orthogonality ±0.5°
Bow ≤2 nm/50 µm
Detection Optical lever (Low-coherence light)
Top-View Optical Microscope Zoom magnification: x1 ~ x7
Field of vision: 910 µm x 650 µm ~130 µm x 90 µm
Monitor magnification: x465 ~ x3255 (27 inch monitor)
Anti-Vibration Desktop active anti-vibration 500 mm(W) x 600 mm (D) x 84 mm (H), approximately 28kg
Soundproof Cover 750 mm(W) x 877 mm (D) x 1400 mm(H), approximately 237 kg
Size 400 mm(W) x 526 mm(D) x 550 mm(H), approximately 90 kg